Molecular hydrogen diffusion in nanostructured amorphous silicon thin films
نویسندگان
چکیده
منابع مشابه
Room temperature reactions involving silicon dangling bond centers and molecular hydrogen in amorphous SiO2 thin films on silicon
When metal/oxide/silicon (MOS) devices are subjected to ionizing radiation, hot carrier damage, or any process in which charge carriers are present in the oxide, interface states are created at the Si/SiO, interfaceelm The presence of holes in the oxide is most effective in triggering the interface state generation process.879 Studies of the transient response of irradiated devices shows that m...
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Surface smoothening mechanism of amorphous silicon thin films.
An important concern in the deposition of thin hydrogenated amorphous silicon () films is to obtain smooth surfaces. Herein, we combine molecular-dynamics simulations with first-principles density functional theory calculations to elucidate the smoothening mechanism of plasma deposited thin films. We show that the deposition precursor may diffuse rapidly on the film surface via overcoordinated ...
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ژورنال
عنوان ژورنال: Physical Review B
سال: 2009
ISSN: 1098-0121,1550-235X
DOI: 10.1103/physrevb.80.073202